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Crystallinity Control through Composition Engineering for High- Performance MgInxOy TFTs via Thermal Atomic Layer Deposition
- 제목
- Crystallinity Control through Composition Engineering for High- Performance MgInxOy TFTs via Thermal Atomic Layer Deposition
- 저자
- 박진성
- 발행일
- 2025-06-25
- 학회명
- ALD/ALE 2025
- 개최지
- ICC JEJU