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Effect of Surfactant Molecular Weight and Concentration on Surface Quality for Final Polishing of Silicon Wafer

  • 박재근
제목
Effect of Surfactant Molecular Weight and Concentration on Surface Quality for Final Polishing of Silicon Wafer
저자
박재근
발행일
2009-12-11
학회명
The 6th International Conference on Advanced Material and Device
개최지
Ramada Plaza Jeju Hotel

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