Atomic Layer Deposition of Zinc Tin Oxide Thin Film Transistor using Water and Hydrogen Peroxide as Reactants

제목
Atomic Layer Deposition of Zinc Tin Oxide Thin Film Transistor using Water and Hydrogen Peroxide as Reactants
저자
박진성
발행일
2013-11-13
학회명
the 2nd International Conference on Advanced Electromaterials
개최지
ICC jeju, Jeju, Korea