Improving Hydrogen Resistance of ALD-Processed Oxide Semiconductors through Prioritizing Factors for Memory Device

제목
Improving Hydrogen Resistance of ALD-Processed Oxide Semiconductors through Prioritizing Factors for Memory Device
저자
박진성
발행일
2025-02-14
학회명
제 32회 한국반도체학술대회
개최지
강원도 하이원리조트