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Influence of crystal nature on gettering efficiency of transition metal, such as Fe and Ni, in CZ silicon wafer

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제목
Influence of crystal nature on gettering efficiency of transition metal, such as Fe and Ni, in CZ silicon wafer
저자
전형탁
발행일
2002-04-19
학회명
2002년도 한국물리학회 봄학술논문발표회
개최지
부산, 백스코

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