Development of a versatile plasma source for various electric probe applications

초록

Electric probes can measure the plasma density and electron temperatures of plasmas in divertor of fusion devices ( , ) in material processor ( , ) and in space environments ( , ). Yet its theory for the data interpretation is not fully, nor reliably established. To examine the theories of electric probe for wide range of plasma and a neutral gas parameters, ePAL (electric Probe Applications Lababoratory) has developed a versatile plasma source with the following characteristics: (i) Density : (ii) Electron Temperature : (iii) Magnetic Field : (iv) Source types : DCC ( Filament ) and RF ( Helicon ) (v) Length : (vi) Diameters : , , (vii) Diagnostics : Optical Emission Spectroscopy (Triple Chamber), Slowly moving Single Probe ( ), Slowly moving Mach Probe ( ), Fast-Scanning Mach Probe ( ), Fast-Scanning Emissive Probe ( ), Fast-Scanning Triple Probe ( ), Gridded Energy Analyzer, Probe, Vector Probe, Versatile Probe for Artificial Satellite, etc. Initial date of plasma generation and philosophies of each section of triple chamber and diagnostics will be addressed. # Work supported by the National Research Laboratory Project of the Korea Institute of Science and Technology Evaluation and Planning under Ministry of Science and Technology of Korea.