P2-13: Field emission characteristics of carbon nanotube forest on etched Si substrate

  • Lee, Jungwoo
  • Park, Taehee
  • Lee, Jongtaek
  • Ahn, Juwon
  • Shin, Mingyeong
  • ... Yi, Whikun
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초록

In this work, we investigatethe field emission characteristics of carbon nanotube forest on three types substrate: (1) mirror polished, (2) chemically etched (large pattern) and (3) chemically etched (small pattern) Si substrate. The surface morphology of CNTs forest was characterized by scanning electron microscopy (SEM), surface chemical state and electronic structure phase analyzed by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy.

키워드

Carbon nanotubeChemical etched Si substrateField emissionField-emission characteristicsSEMSi substratesSurface chemical stateCarbon nanotubesElectronic structureField emissionNanoelectronicsRaman spectroscopyScanning electron microscopySiliconVacuumX ray photoelectron spectroscopySubstrates
제목
P2-13: Field emission characteristics of carbon nanotube forest on etched Si substrate
저자
Lee, JungwooPark, TaeheeLee, JongtaekAhn, JuwonShin, MingyeongYi, Whikun
DOI
10.1109/IVNC.2010.5563155
발행일
2010-07
유형
Conference Paper
저널명
23rd International Vacuum Nanoelectronics Conference, IVNC 2010
페이지
147 ~ 148