Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers

초록

Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers

제목
Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers
저자
이승백
발행일
2009-05-27
학회명
International conference on electron, ion and photon beam and microfabrication
개최지
Florida, USA