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Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers
초록
Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers
- 제목
- Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers
- 저자
- 이승백
- 발행일
- 2009-05-27
- 학회명
- International conference on electron, ion and photon beam and microfabrication
- 개최지
- Florida, USA