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Effect of Susceptor Structure in HVPE GaN growth on Total Thickness Variation of 2-inch GaN Wafer

  • 박재근
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Effect of Susceptor Structure in HVPE GaN growth on Total Thickness Variation of 2-inch GaN Wafer
저자
박재근
발행일
2018-04-20
학회명
2018년 춘계학술대회 4차 산업혁명을 준비하는 반도체/디스플레이 기술
개최지
한국기계연구원(대전)

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