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Microstructural and optical properties of multilayered SiC nanoparticles embedded in a silicon nitride layer formed by using sputtering and annealing

  • 김태환
제목
Microstructural and optical properties of multilayered SiC nanoparticles embedded in a silicon nitride layer formed by using sputtering and annealing
저자
김태환
발행일
2012-08-16
학회명
The 10th international nanotech symposium & Nano-Convergence Expo (NANO KOREA 2012)

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