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Low temperature growth of carbon nanotube by plasma enhanced chemical vapor deposition(PECVD) using nickel catalyst

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Low temperature growth of carbon nanotube by plasma enhanced chemical vapor deposition(PECVD) using nickel catalyst
저자
전형탁
발행일
2000-04-24
학회명
The Microelectronics and Packaging Society (SEOUL)
개최지
서울

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