In-Situ patterning of carbon nanotube thin film Sensor device by vacuum filtration

초록

Recently, the ineterst in small size sensors has been increased, which are mechanically stable, low power consuming and highly sensitive. We presented the fabrication process of flexible and transparent silozane substrates using the selective vacuum filtration. We deposited SWCNT thin film device structures directly on the substrate using a pre-patterned membrane filter. We found that the lower SWCNT density network thin film had higher sensitivity to NH3 or NO2 gas pressure. Although the CNT gas sensors have good sensing properties to specific gas molecules