상세 보기
Dry Development of Organic-Inorganic Hybrid EUV Resists: High-Resolution Patterning Enabled by Chemical Vapor Development
- 제목
- Dry Development of Organic-Inorganic Hybrid EUV Resists: High-Resolution Patterning Enabled by Chemical Vapor Development
- 저자
- 안진호
- 발행일
- 2025-07-02
- 학회명
- NANO KOREA 2025
- 개최지
- 일산 KINTEX