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A Sequential Neural Model towards Fault Detection and Classification for Semiconductor Manufacturing Processes
- Park, Byeongtae;
- Lee, Jongsoo;
- Chae, Dong Kyu
- 제목
- A Sequential Neural Model towards Fault Detection and Classification for Semiconductor Manufacturing Processes
- 저자
- Park, Byeongtae; Lee, Jongsoo; Chae, Dong Kyu
- 발행일
- 2022-11
- 유형
- Proceeding
- 저널명
- Korean International Semiconductor Conference on Manufacturing Technology (KISM) 2022
- 페이지
- 353 ~ 353