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Nanotopography Impact of Surfactant Concentration and Molecular Weight of Nano-ceria Slurry on Oxide Removal Rate and Remaining Oxide Thickness Variation after STI CMP
- 제목
- Nanotopography Impact of Surfactant Concentration and Molecular Weight of Nano-ceria Slurry on Oxide Removal Rate and Remaining Oxide Thickness Variation after STI CMP
- 저자
- 백운규
- 발행일
- 2006-11-03
- 학회명
- ECS-2006 JOINT INTERNATIONAL MEETING
- 개최지
- Moon Palace Hotel(Mexico)