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Improved Reliability of Plasma-Enhanced ALD-derived HfO2/IGZO Thin-Film Transistors

제목
Improved Reliability of Plasma-Enhanced ALD-derived HfO2/IGZO Thin-Film Transistors
저자
정재경
발행일
2023-12-07
학회명
IDW
개최지
TOKI MESSE Niigata Convention Center

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