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Structural Design and Performance Evaluation of Phenyl(Alkyl)trimethoxysilanes as Small Molecular Inhibitors for Area-Selective Atomic Layer Deposition of VO₂
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- Structural Design and Performance Evaluation of Phenyl(Alkyl)trimethoxysilanes as Small Molecular Inhibitors for Area-Selective Atomic Layer Deposition of VO₂
- 저자
- 박진성
- 발행일
- 2025-03-25
- 학회명
- AREA SELECTIVE DEPOSITION WORKSHOP 2025
- 개최지
- LEIPZIG, GERMANY