Structural Design and Performance Evaluation of Phenyl(Alkyl)trimethoxysilanes as Small Molecular Inhibitors for Area-Selective Atomic Layer Deposition of VO₂

제목
Structural Design and Performance Evaluation of Phenyl(Alkyl)trimethoxysilanes as Small Molecular Inhibitors for Area-Selective Atomic Layer Deposition of VO₂
저자
박진성
발행일
2025-03-25
학회명
AREA SELECTIVE DEPOSITION WORKSHOP 2025
개최지
LEIPZIG, GERMANY