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Effect of Physicochemical Characteristics of Nano Ceria Slurry on Shallow Trench Isolation CMP

  • 박재근
제목
Effect of Physicochemical Characteristics of Nano Ceria Slurry on Shallow Trench Isolation CMP
저자
박재근
발행일
2005-03-31
학회명
2005 MRS SPRING MEETING
개최지
San Francisco, CA

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