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- 제목
- THE INFLUENCE OF SUSPENDING ENVIRONMENT ON THE DISPERSION STABILITY OF SLURRY AND ITS EFFECT ON Cu CMP PROCESS
- 저자
- 박재근
- 발행일
- 2003-04-29
- 학회명
- 105th ANNUAL MEETING & EXPOSITION OF THE AMERICAN CERAMIC SOCIETY
- 개최지
- GARYLORD OPRYLAND,NASHVILLE,TENNESSEE,USA