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Reaction mechanism studies on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene

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Reaction mechanism studies on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene
저자
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발행일
2008-10-20
학회명
55th AVS International Symposium & ExhibitionBoston, MA

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