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Dependence of Planarization efficiency on crystal characteristic of abrasives in nano ceria slurry for shallow trench isolation chemical mechanical polishing
- 제목
- Dependence of Planarization efficiency on crystal characteristic of abrasives in nano ceria slurry for shallow trench isolation chemical mechanical polishing
- 저자
- 백운규
- 발행일
- 2004-02-20
- 학회명
- 제11회 한국반도체학술대회
- 개최지
- 무주리조트