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Electrical characterization of TiSi2 nanocrystals grown on multi-stacked tunnel layer for nonvolatile memory

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Electrical characterization of TiSi2 nanocrystals grown on multi-stacked tunnel layer for nonvolatile memory
저자
김은규
발행일
2009-08-20
학회명
제37회 한국진공학회 하계정기학술대회
개최지
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