Flexible 탄소나노튜브 박막의 가스센서 동작특성 조사

초록

We have fabricated density controlled single-walled carbon nanotube (SWCNT) thin films on poly(dimethyl siloxane) (PDMS) substrates using vacuum filteration and mold transfer method. The optoelectronic measurement shows that the thin film optical transparency is inversely proportional to SWCNT density and conductivity. The characteristics scaled with measured thin film dimensions showing uniform SWCNT distribution within the thin film. The flexible SWCNT thin film showed negligible change in conductance after being bent by 180o. We evaluated its gas sensing operation depending on SWCNT density and bias voltage. It was shown that lower SWCNT density thin films had higher sensitivity to NH3 gas, which may be due to higher exposed surface area for lower density SWCNT thin films. Also, we found that lower bias voltage devices showed faster recovery times. The results show that vacuum filteration and mold transfer produces flexible SWCNT thin films that have stable mechanical and electrical characteristics and also gas sensing capabilities making them applicable to future flexible electronic devices.