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Residual compressive stress behaviour of Si incorporated ta-C films: Molecular dynamics study
- 제목
- Residual compressive stress behaviour of Si incorporated ta-C films: Molecular dynamics study
- 저자
- 정용재
- 발행일
- 2005-07-04
- 학회명
- 2005 International Conference on Carbon
- 개최지
- Gyeongju, Korea