Dry Etchable Inorganic/Organic Hybrid Structure of SiOx-SiNx-Tincone Deposited by Atomic/Molecular Layer Deposition for Bendable OLED Encapsulation

제목
Dry Etchable Inorganic/Organic Hybrid Structure of SiOx-SiNx-Tincone Deposited by Atomic/Molecular Layer Deposition for Bendable OLED Encapsulation
저자
박진성
발행일
2024-08-21
학회명
IMID 2024
개최지
ICC Jeju, Jeju, Korea