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Dry Etchable Inorganic/Organic Hybrid Structure of SiOx-SiNx-Tincone Deposited by Atomic/Molecular Layer Deposition for Bendable OLED Encapsulation
- 제목
- Dry Etchable Inorganic/Organic Hybrid Structure of SiOx-SiNx-Tincone Deposited by Atomic/Molecular Layer Deposition for Bendable OLED Encapsulation
- 저자
- 박진성
- 발행일
- 2024-08-21
- 학회명
- IMID 2024
- 개최지
- ICC Jeju, Jeju, Korea