Defect engineering of GaN epi-layers by electron-beam irradiation and post thermal annealing process

  • 김은규
제목
Defect engineering of GaN epi-layers by electron-beam irradiation and post thermal annealing process
저자
김은규
발행일
2007-12-13
학회명
5th Inter. Conf. on Advanced Materials and Devices
개최지
Jeju, Korea