Multi-Wavelength High Resolution Micro-Raman and Optical Reflectance Characterization of Nano-Scale Strained Silicon-on-Insulator Substrates

  • 박재근
제목
Multi-Wavelength High Resolution Micro-Raman and Optical Reflectance Characterization of Nano-Scale Strained Silicon-on-Insulator Substrates
저자
박재근
발행일
2012-10-09
학회명
222nd ECS Meeting
개최지
Hawaii Convention Center and the Hilton Hawaiian Village