FTIR and ICP-MS analysis of components of silica soot fabricated by Flame Hydrolysis Deposition

초록

As a fundamental process of fabricating passive integrated optical devices used in optical communication, FHD(Flame Hydrolysis Deposition) forms SiO2 through sublimation of SiCl4 and supply of high temperature flame produced by the mixture of oxygen and hydrogen. Since so many factors are involved in forming flame to affect the properties of thin film, it is not easy to expect the properties of thin film. In this research, compositional analysis of soot by FTIR and ICP-MS under the control of the amount of dopant is carried out to obtain the basic information on the optical and structural properties of thin film. By measuring spectrum of absorbance from FTIR, the compositional change of B-O and P-O in soot was observed, and the spectrum of absorbance of B-O and P-O could be linearized by ICP-MS.