Effect of the interface roughness of the high-k dielectric layer on the electron mobility in the channel of the MOSFETs

  • 김태환
제목
Effect of the interface roughness of the high-k dielectric layer on the electron mobility in the channel of the MOSFETs
저자
김태환
발행일
2014-12-07
학회명
The 17th International Symposium on the Physics of Semiconductors and Applications
개최지
Ramada Plaza Jeju Hotel, Jeju, Korea