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1-D Electromagnetic Particle-In-Cell Simulations on High Frequency Capacitively Coupled Plasma Discharges
- 제목
- 1-D Electromagnetic Particle-In-Cell Simulations on High Frequency Capacitively Coupled Plasma Discharges
- 저자
- Ming-Chieh Lin
- 발행일
- 2024-06-18
- 학회명
- The 51st IEEE International Conference on Plasma Science (ICOPS)
- 개최지
- Beijing, China