High-Performance Amorphous InGaZnO Thin-Film Transistors via Staked Ultrathin High-k TaOx Buffer Layer Grown on Low-k SiO2 Gate Oxide

  • Kang, Tae Sung
  • Yoon, Kap Soo
  • Baek, Gwang Ho
  • Ko, Won Bae
  • Yang, Seung Mo
  • ... Hong, Jin Pyo
  • 외 1명
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초록

Efficient reduction of interfacial defect states is achieved by using an intentionally controlled ultrathin TaOx buffer layer. This process allows for the fabrication of IGZO thin-film transistors (TFTs) with highly enhanced performance. These results may open a new avenue for the development of high-performance oxide-based TFTs.

키워드

IGZO TFTstantalum oxidethermalization energythin film transistorsMOBILITYMETASTABILITYSPECTROSCOPYSTABILITYTFT
제목
High-Performance Amorphous InGaZnO Thin-Film Transistors via Staked Ultrathin High-k TaOx Buffer Layer Grown on Low-k SiO2 Gate Oxide
저자
Kang, Tae SungYoon, Kap SooBaek, Gwang HoKo, Won BaeYang, Seung MoYeon, Bum MoHong, Jin Pyo
DOI
10.1002/aelm.201600452
발행일
2017-00
유형
Article
저널명
Advanced Electronic Materials
3
3
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