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"Evaluating thermal and mechanical properties of composite films for EUV pellicle applications"
- 제목
- "Evaluating thermal and mechanical properties of composite films for EUV pellicle applications"
- 저자
- 안진호
- 발행일
- 2018-06-13
- 학회명
- 2018 EUVL workshop
- 개최지
- Berkeley, CA, USA