상세 보기
The atomic layer deposition with wave bumps on rotary reactor bed: its application to the fabrication of core/shell nano-particles
- 제목
- The atomic layer deposition with wave bumps on rotary reactor bed: its application to the fabrication of core/shell nano-particles
- 저자
- 안진호
- 발행일
- 2016-03-30
- 학회명
- 2016 MRS spring
- 개최지
- 미국