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The effect of physical characteristics of cerium oxide on nanotopography of chemical mechanical polishing for shallow trench isolation
- 제목
- The effect of physical characteristics of cerium oxide on nanotopography of chemical mechanical polishing for shallow trench isolation
- 저자
- 백운규
- 발행일
- 2003-04-18
- 학회명
- 2003 춘계 한국세라믹학회
- 개최지
- 경기대학교