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The Property of CeO2 Abrasive Particles in Chemical Mechanical Planarization for Shallow Trench Isolation
- 제목
- The Property of CeO2 Abrasive Particles in Chemical Mechanical Planarization for Shallow Trench Isolation
- 저자
- 백운규
- 발행일
- 2002-04-28
- 학회명
- 104th Annual Meeting & Exposition
- 개최지
- 세인트루이스