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High-removal selectivity through interaction between polyacrylamide and SiO2 film in poly isolation chemical mechanical planarization

  • 박재근
제목
High-removal selectivity through interaction between polyacrylamide and SiO2 film in poly isolation chemical mechanical planarization
저자
박재근
발행일
2007-07-09
학회명
2007 NanoSMAT
개최지
Hotel Pestana Alvor Praia

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