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Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Operated at 2.45 GHz Using the Multiphysics Modeling based on a Finite Element Method
- 제목
- Design and Simulation of a Microwave Plasma Enhanced Chemical Vapor Deposition System Operated at 2.45 GHz Using the Multiphysics Modeling based on a Finite Element Method
- 저자
- Ming-Chieh Lin
- 발행일
- 2023-04-26
- 학회명
- The 24th International Vacuum Electronics Conference (IVEC 2023)
- 개최지
- Chengdu, China