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Enhanced Crystallinity Using In Situ Atomic Layer Deposition Process of Al2O3 on p type SnO Thin Film and the Associated Device Applications
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- Enhanced Crystallinity Using In Situ Atomic Layer Deposition Process of Al2O3 on p type SnO Thin Film and the Associated Device Applications
- 저자
- 박진성
- 발행일
- 2022-06-28
- 학회명
- ALD 2022