Synthesis of large grain MoS2 films by control of vertical distance from source to substrate during chemical vapor deposition

  • 김은규
제목
Synthesis of large grain MoS2 films by control of vertical distance from source to substrate during chemical vapor deposition
저자
김은규
발행일
2017-02-16
학회명
제52회 한국진공학회 동계정기학술대회
개최지
웰리힐리파크