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Improved Mobility and High Reliability Characteristics of 1:1:1 Composition Indium- Gallium-Zinc-Oxide Using PEALD
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- Improved Mobility and High Reliability Characteristics of 1:1:1 Composition Indium- Gallium-Zinc-Oxide Using PEALD
- 저자
- 박진성
- 발행일
- 2025-08-20
- 학회명
- IMID2025
- 개최지
- 부산 벡스코