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Precursor dependent rutile phase formation of atomic-layer deposited TiO2 film on Ru electrode for DRAM capacitor applications
- 제목
- Precursor dependent rutile phase formation of atomic-layer deposited TiO2 film on Ru electrode for DRAM capacitor applications
- 저자
- 안진호
- 발행일
- 2009-07-20
- 학회명
- ALD 2009(9th international conference on atomic layer deposition)
- 개최지
- USA