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Remote Plasma-Enhanced Atomic Layer Deposition(PEALD) of TiN Using TDMAT with NH3 Plasma

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Remote Plasma-Enhanced Atomic Layer Deposition(PEALD) of TiN Using TDMAT with NH3 Plasma
저자
전형탁
발행일
2003-12-03
학회명
2003 MRS Fall Meeting
개최지
Hynes Convention Center and Sheraton Boston Hotel Boston,U.S.A

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