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Evaluation of property change by the insertion of Ru layer into Mo/Si multilayer
- 제목
- Evaluation of property change by the insertion of Ru layer into Mo/Si multilayer
- 저자
- 정용재
- 발행일
- 2003-09-30
- 학회명
- 2nd International Extreme UltraViolet Symposium
- 개최지
- Antwerp, Belgium