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Effect of oxygen plasma power control on the Hafnium oxide thin film using plasma-enhanced atomic layer deposition

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Effect of oxygen plasma power control on the Hafnium oxide thin film using plasma-enhanced atomic layer deposition
저자
전형탁
발행일
2022-05-27
학회명
2022년 한국반도체디스플레이기술학회 춘계학술대회
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