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- 제목
- Characteristics of TiN films deposited by plasma enhanced atomic layer deposition (PEALD) method
- 저자
- 전형탁
- 발행일
- 2002-11-28
- 학회명
- 2002 Annual Conference of Core University Program (CUP) on Ceramic Materials Technology
- 개최지
- Hanyang University, Seoul, Korea