상세 보기
Introduction on atomic layer deposition for high-k dieletric & high mobility oxide semiconductor thin film transistors
- 제목
- Introduction on atomic layer deposition for high-k dieletric & high mobility oxide semiconductor thin film transistors
- 저자
- 박진성
- 발행일
- 2019-05-22
- 학회명
- ULSIC vs TFT: 7th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
- 개최지
- Palace Side Hotel, Kyoto, Japan