Control of Thermally Activated Ta Atom Diffusion Behavior Employing Ta Layer Thicknesses and Diffusion Sponge Function of TaOx Layer

제목
Control of Thermally Activated Ta Atom Diffusion Behavior Employing Ta Layer Thicknesses and Diffusion Sponge Function of TaOx Layer
저자
홍진표
발행일
2015-04-23
학회명
한국 물리학회
개최지
대전 컨벤션 센터