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WSi2 nanocrystal memory with Al2O3/HfO2/Al2O3 and SiO2/HfO2/Al2O3 barrier engineered high-K tunnel layers

  • 김은규
제목
WSi2 nanocrystal memory with Al2O3/HfO2/Al2O3 and SiO2/HfO2/Al2O3 barrier engineered high-K tunnel layers
저자
김은규
발행일
2010-10-22
학회명
2010년 한국물리학회 가을학술논문발표회
개최지
휘닉스파크

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