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Reduction of Wafer Bowing in Free-standing GaN grown by Hybride vapor-phase Epitaxy

  • 박재근
제목
Reduction of Wafer Bowing in Free-standing GaN grown by Hybride vapor-phase Epitaxy
저자
박재근
발행일
2016-11-19
학회명
International Symposium on Mechanical Engineering and Material Science (ISMEMS 2016)
개최지
Ramada Plaza Jeju Ocean Front Hotel

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