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The Reduced Residual Compressive Stress of Si-incorporated ta-C Films: Molecular Dynamics Study

제목
The Reduced Residual Compressive Stress of Si-incorporated ta-C Films: Molecular Dynamics Study
저자
정용재
발행일
2005-09-23
학회명
2005 대한금속재료학회
개최지
대한민국

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